
Napakataas na kadalisayan ng Gas Purifier/Purification System/Generator
Mga lugar ng aplikasyon: electronic semiconductors, large-scale integrated circuit, MAMS, monocrystalline silicon polycrystalline silicon at silicon epitaxy, LED, TFT, gallium nitride, silicon carbide, siyentipikong pananaliksik at pag-unlad, eksperimentong pagsusuri, atbp.
Mga katangian
● Dalawang tower kahaliling adsorption pagbabagong-buhay, awtomatikong tuluy-tuloy na operasyon. | ![]() |
Mga Parameter ng Talahanayan
Mga modelo ng serye | Para sa gas | Raw gas index | Index ng gas ng produkto | |||||||||||
N2 | H2 | ANG2 | Sa | Siya | ANG2 | H2ANG | CO2 | CO | CH4 | H2 | N2 | Granularity | ||
9VV | ● | ● | ● | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | — | 0.003mm |
9OVV | ● | — | ● | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | 0.003mm |
9VVX | — | — | — | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | 0.003mm |
— | ● | — | — | — | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | 0.003mm | ||
9X | — | — | — | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | 0.003mm |
— | ● | — | — | — | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | 0.003mm | ||
Tandaan: Mga karaniwang pagtutukoy ng daloy:1-20000Nm3/h;Karaniwang ginagamit na presyon:1-20Mpa |